Tr?nh, H.-X.H.-X.Tr?nhLin, S.-T.S.-T.LinChen, L.-C.L.-C.ChenYeh, S.-L.S.-L.YehChen, C.-S.C.-S.ChenHoang, H.-H.H.-H.HoangLIANG-CHIA CHEN2020-01-132020-01-132017https://scholars.lib.ntu.edu.tw/handle/123456789/447821Shearing interference microscope for step-height measurementsjournal article10.1111/jmi.125272-s2.0-85014663797https://www.scopus.com/inward/record.uri?eid=2-s2.0-85014663797&doi=10.1111%2fjmi.12527&partnerID=40&md5=e9368179e2ac916798ade340175a8395