The demonstration of D-SMT stressor on Si and Ge n-FinFETs

Liao, M.-H.M.-H.LiaoChen, P.G.P.G.ChenHuang, S.C.S.C.HuangKao, S.C.S.C.KaoHung, C.X.C.X.HungLiu, K.H.K.H.LiuLien, C.C.LienLiu, C.Y.C.Y.Liu2019-03-112019-03-112014https://scholars.lib.ntu.edu.tw/handle/123456789/404496The demonstration of D-SMT stressor on Si and Ge n-FinFETs10.1109/VLSIT.2014.68944242-s2.0-84907681159