Macromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electrothermal Actuations

Yang, Y.-J.Y.-J.YangCheng, S.-Y.S.-Y.ChengShen, K.-Y.K.-Y.ShenYangYJ2008-11-052018-06-282008-11-052018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/85998application/pdf189137 bytesapplication/pdfen-USMacromodeling of Coupled-Domain MEMS Devices with Electrostatic and Electrothermal Actuationsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/85998/1/10.pdf