蔡睿哲臺灣大學：光電工程學研究所邱聖傑Chiou, Sheng-JieSheng-JieChiou2007-11-252018-07-052007-11-252018-07-052007http://ntur.lib.ntu.edu.tw//handle/246246/50853中文摘要 本篇論文利用美國國家實驗室所提供SUMMiT-VTM 製程，利用五 層的多晶矽的表面微加工製程，設計二維旋轉微鏡片，利用交錯的上 彈簧與下彈簧結構，達到兩個維度的旋轉，特色在於電極的設計是輻 射狀垂直梳型。 之後對所設計的元件進行模擬，針對此新穎的輻射狀垂直梳型結 構利用ANSYS 所提供的順序耦合場進行有限元素分析。可得到以下 彈簧可得到最大的旋轉角度為±3.61° (45V)，上彈簧的最大旋轉角度為 ±3.01° (67V) 最後再做結構模態分析，瞭解元件剛性，求共振頻率。並根據分 析的結果來設計最佳化的元件。 關鍵字： 有限元素分析，耦合場分析，模態分析，靜電致動器，光學 微機電Abstract We have designed a two-axis scanner with hidden radial vertical comb drive actuator. The device is fabricated using SUMMiT-VTM micromaching process offered by Sandia National Laboratory.It has five polysilicon structual layers. A cross-bar spring structure consisting of lower and upper torsion springs is designed to obtain two rotational degrees of freedom, enabling the dual-axis rotation with cross bar spring structure.It is driven by electrostatic force. Mechanical maximum rotation angles of ±3.61° (45V) and ±3.01° (67V) are achieved for rotation about the single lower and upper springs of the cross-bar spring structure, respectively. Use modal analysis to determine the vibration characteristics (natural frequencies and mode shapes) of a structure or a machine component while it is being designed.Optimize MEMS design based on modal analysis and coupled field analysis result. Keyword: Finite Element Method , Coupled field analysis , Modal analysis , two-axis scanner , MOMES目錄 目錄...........................................................................................Ⅰ 中文摘要....................................................................................Ⅲ Abstract......................................................................................Ⅳ 圖目錄.......................................................................................Ⅴ 表目錄.......................................................................................Ⅷ 第一章 緒論 1.1 研究動機..........................................................................1 1.2 研究目的..........................................................................2 1.3 全文架構..........................................................................3 第二章 微機電概觀 2.1 微機電簡介…...................................................................4 2.2 光學微機電......................................................................6 2.3 靜電致動器.....................................................................11 2.4 SUMMIT-V process 製程技術..........................................15 II 第三章 電腦輔助分析軟體_Ansys 3.1 電腦輔助分析概觀.........................................................17 3.2 有限元素分析法.............................................................20 3.3 有限元素分析軟體＿ANSYS..........................................22 3.4 ANSYS 耦合場分析……….............. ...............................25 3.5 ANSYS 結構分析…........................................................29 第四章 輻射分佈梳狀致動器之微鏡面 4.1 輻射分佈梳狀致動器的設計...........................................31 4.2 靜電-結構耦合場分析....................................................35 4.3 模擬分析結果.................................................................37 4.4 模態分析........................................................................45 4.5 實驗量測結果.................................................................48 第五章 結論與未來展望 5.1 結論...............................................................................49 5.2 未來展望........................................................................49 參考文獻....................................................................................505266467 bytesapplication/pdfen-US有限元素分析耦合場分析模態分析靜電致動器光學微機電Finite Element MethodCoupled field analysisModal analysistwo-axis scannerMOMESthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/50853/1/ntu-96-J94941008-1.pdf