2024-1-12025-04-14https://scholars.lib.ntu.edu.tw/handle/123456789/727673ferroelectric memoryHf1-xZrxO2nano-laminationsuperlatticeGate-all-around FETnt鐵電記憶體氧化鉿鋯奈米貼合超晶格三維閘極包覆式電晶體