Reduced dimensional analysis on dynamic characteristics of microcantilever beams in the fluid environment and application to atomic force microscopy

Huang, K.-R.K.-R.HuangLiao, Z.-Y.Z.-Y.LiaoChang, J.-S.J.-S.ChangChao, S.D.S.D.ChaoWu, K.-C.K.-C.WuKUANG-CHONG WUSHENG-DER CHAO2020-04-282020-04-282011https://scholars.lib.ntu.edu.tw/handle/123456789/486925Reduced dimensional analysis on dynamic characteristics of microcantilever beams in the fluid environment and application to atomic force microscopyconference paper10.1109/NEMS.2011.60173952-s2.0-80053321760https://www.scopus.com/inward/record.uri?eid=2-s2.0-80053321760&doi=10.1109%2fNEMS.2011.6017395&partnerID=40&md5=a0c79d0f56de15fdbba0cd2efbee902f