An Air-Coupled Capacitive Micromachined Ultrasound Transducer for Noncontact Nondestructive Evaluation

Xuefeng WangYing FanWei-Cheng TianHyon-Jin KwonStacey KennedyGlenn Claydonrew MayWEI-CHENG TIAN2018-09-102018-09-102007-10http://scholars.lib.ntu.edu.tw/handle/123456789/333889[SDGs]SDG7An Air-Coupled Capacitive Micromachined Ultrasound Transducer for Noncontact Nondestructive Evaluationconference paper10.1109/ICSENS.2007.43886902-s2.0-48349121330