Growth of ternary silicon carbon nitride as a new wide bandgap material

YANG-FANG CHEN2018-09-102018-09-101997http://www.scopus.com/inward/record.url?eid=2-s2.0-0030688772&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/329238Growth of ternary silicon carbon nitride as a new wide bandgap materialconference paper2-s2.0-0030688772