Fabrication of concave gratings by curved surface UV-nanoimprint lithography

Yung-Pin ChenYuet-Ping LeeJer-Haur ChangLon A. WangLON A. WANG2018-09-102018-09-102008-09http://scholars.lib.ntu.edu.tw/handle/123456789/342844Fabrication of concave gratings by curved surface UV-nanoimprint lithographyjournal article10.1116/1.29687022-s2.0-53349153203WOS:000259874900010