Molecular dynamics study of copper trench filling in damascene process

Hong, R.T.R.T.HongHuang, M.J.M.J.HuangYang, J.Y.J.Y.YangMEI-JIAU HUANG2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/447925Molecular dynamics study of copper trench filling in damascene processjournal article10.1016/j.mssp.2005.05.0012-s2.0-27844478321https://www.scopus.com/inward/record.uri?eid=2-s2.0-27844478321&doi=10.1016%2fj.mssp.2005.05.001&partnerID=40&md5=6350fe94a6764b5a811417980d92dab0