Enhanced voltage linearity of HfO<inf>2</inf> metal-insulator-metal capacitors by H<inf>2</inf>O prepulsing treatment on bottom electrode

CHEE-WEE LIULin, C.-M.C.-M.LinChen, Y.-T.Y.-T.ChenLee, C.-H.C.-H.LeeChang, H.-C.H.-C.ChangChang, W.-C.W.-C.ChangCHEE-WEE LIU2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-79952564604&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358256Enhanced voltage linearity of HfO<inf>2</inf> metal-insulator-metal capacitors by H<inf>2</inf>O prepulsing treatment on bottom electrodeconference paper10.1149/1.3485244