A compact tapping mode AFM with sliding mode controller for precision image scanning

Wu, J.-W.J.-W.WuChen, M.-Y.M.-Y.ChenHung, S.-K.S.-K.HungFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80051988737&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/365115A compact tapping mode AFM with sliding mode controller for precision image scanningconference paper