Piezoelectric gas flow controller based on dual-bimorph actuators

Huang, C.-Y.C.-Y.HuangHsu, Y.-H.Y.-H.HsuCHIH-KUNG LEEYU-HSIANG HSU2020-04-282020-04-282018https://scholars.lib.ntu.edu.tw/handle/123456789/486106Piezoelectric gas flow controller based on dual-bimorph actuatorsconference paper10.1117/12.22967682-s2.0-85048056264https://www.scopus.com/inward/record.uri?eid=2-s2.0-85048056264&doi=10.1117%2f12.2296768&partnerID=40&md5=98df94986cc99492d85e21661d76521a