A Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolution

Su, C.C.C.C.SuLiu, TyngTyngLiuTsai, C.L.C.L.TsaiChang, S.H.S.H.ChangTYNG LIU2021-12-132021-12-132011https://scholars.lib.ntu.edu.tw/handle/123456789/589763Guanajuato, MéxicoA Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolutionconference paper