High κ/InGaAs for ultimate CMOS - Interfacial passivation, low ohmic contacts, and device performance (Invited)

Chang, W.H.W.H.ChangLin, T.D.T.D.LinLiao, M.H.M.H.LiaoPi, T.W.T.W.PiKwo, J.J.KwoHong, M.M.Hong2019-03-112019-03-112014https://scholars.lib.ntu.edu.tw/handle/123456789/404500High κ/InGaAs for ultimate CMOS - Interfacial passivation, low ohmic contacts, and device performance (Invited)conference paper10.1149/06102.0113ecst2-s2.0-84925141714