A fundamental modeling approach for nano-grinding of silicon wafers

H. T. YoungHung-Yi HuangYING-JAY YANG2018-09-102018-09-102005-11http://scholars.lib.ntu.edu.tw/handle/123456789/318178A fundamental modeling approach for nano-grinding of silicon wafersconference paper10.4028/0-87849-990-3.2532-s2.0-35348923540