2024-05-182024-05-1808972https://scholars.lib.ntu.edu.tw/handle/123456789/717966Femtosecond Laser ProcessingWafer Ultra-precision Grinding5-axis CAM for Aeronautical ApplicationsIntegration of Mechanical Systems航太製造技術-CAM及五軸加工應用機械系統整合飛秒雷射加工矽晶圓超精密輪磨