Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis

Tsai, M.-F.M.-F.TsaiChang, S.-J.S.-J.ChangChen, C.C.P.C.C.P.ChenMelvin III, L.S.L.S.Melvin IIICHUNG-PING CHEN2020-06-112020-06-112009https://scholars.lib.ntu.edu.tw/handle/123456789/501078Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysisconference paper10.1117/12.8144192-s2.0-65849270205https://www.scopus.com/inward/record.uri?eid=2-s2.0-65849270205&doi=10.1117%2f12.814419&partnerID=40&md5=4a63745068e013a4614122d7e2235f4f