Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films

Chhowalla M.Robertson J.Chen C.W.Silva S.R.P.Davis C.A.Amaratunga G.A.J.Milne W.I.CHUN-WEI CHEN2019-11-272019-11-27199700218979https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000560715&doi=10.1063%2f1.364000&partnerID=40&md5=b675a8f5e0d2f63202f50537f9e4aa82https://scholars.lib.ntu.edu.tw/handle/123456789/432894[SDGs]SDG7Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) filmsjournal article10.1063/1.3640002-s2.0-0000560715