Lee, C. Y.C. Y.LeeCheng, Y. C.Y. C.ChengWu, T. T.T. T.WuChen, Y. Y.Y. Y.ChenChen, W. J.W. J.ChenPao, S. Y.S. Y.PaoChang, P. Z.P. Z.ChangChen, Ping HeiPing HeiChen2010-09-072018-06-282010-09-072018-06-282005-10http://ntur.lib.ntu.edu.tw//handle/246246/200253en-USNovel Method for In-situ Monitoring of Thickness of Quartz during Wet Etchingjournal article