Optimization and characterization of RF sputtered piezoelectric zinc oxide thin film for transducer applications

Hsu, Y.-H.Y.-H.HsuLin, J.J.LinTang, W.C.W.C.TangYU-HSIANG HSU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-48149086876&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/331634Optimization and characterization of RF sputtered piezoelectric zinc oxide thin film for transducer applicationsconference paper10.1109/ULTSYM.2007.6022-s2.0-48149086876