A large-stroke deformable mirror by gear shaped IPMC design

Wei, H.-C.H.-C.WeiGUO-DUNG JOHN SU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80053332280&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/364854A large-stroke deformable mirror by gear shaped IPMC designconference paper10.1109/NEMS.2011.6017308