Deposition of silicon carbon nitride films by ion beam sputtering

Wu, J. J.J. J.WuWu, C. T.C. T.WuLiao, Y. C.Y. C.LiaoLu, T. R.T. R.LuChen, L. C.L. C.ChenChen, K. H.K. H.ChenHwa, L. G.L. G.HwaKuo, C. T.C. T.KuoYING-CHIH LIAOLI-CHYONG CHEN2020-01-062020-01-0619990040-6090https://scholars.lib.ntu.edu.tw/handle/123456789/445988Deposition of silicon carbon nitride films by ion beam sputteringjournal article10.1016/S0040-6090(99)00458-7WOS:000084500800073