Simultaneously determining Young's modulus, coefficient of thermal expansion, Poisson ratio and thickness of thin films on silicon wafer

Inst. of Appl. Mech., National Taiwan Univ.Wu, EnboaEnboaWuYang, A.J.D.A.J.D.YangShao, Ching-AnChing-AnShao2007-04-192018-06-292007-04-192018-06-292004-06http://ntur.lib.ntu.edu.tw//handle/246246/200704191001151application/pdf566902 bytesapplication/pdfen-USSimultaneously determining Young's modulus, coefficient of thermal expansion, Poisson ratio and thickness of thin films on silicon waferother10.1109/ECTC.2004.1319444http://ntur.lib.ntu.edu.tw/bitstream/246246/200704191001151/1/01319444.pdf