Density and grain size of the IrO<inf>x</inf> metal nanocrystals in n-Si/SiO<inf>2</inf>/Al<inf>2</inf>O<inf>3</inf>/IrO<inf>x</inf>/Al <inf>2</inf>O<inf>3</inf> memory capacitors

Li, W.C.W.C.LiBanerjee, W.W.BanerjeeMaikap, S.S.MaikapYang, J.R.J.R.YangJER-REN YANG2020-05-122020-05-122010https://scholars.lib.ntu.edu.tw/handle/123456789/491592Density and grain size of the IrO<inf>x</inf> metal nanocrystals in n-Si/SiO<inf>2</inf>/Al<inf>2</inf>O<inf>3</inf>/IrO<inf>x</inf>/Al <inf>2</inf>O<inf>3</inf> memory capacitorsconference paper10.1149/1.34816212-s2.0-79952634060https://www.scopus.com/inward/record.uri?eid=2-s2.0-79952634060&doi=10.1149%2f1.3481621&partnerID=40&md5=fcb5bcda4e01c2380d05f6fe4616968e