Inst. of Appl. Mech., National Taiwan Univ.Hsu, W.L.W.L.HsuLee, S.S.S.S.LeeHuang, N.Z.N.Z.HuangChen, Y.W.Y.W.ChenChan, Y.W.Y.W.ChanLee, C.K.C.K.LeeLai, W.R.W.R.LaiChen, Y.H.Y.H.Chen2007-04-192018-06-292007-04-192018-06-292005-07N/Ahttp://ntur.lib.ntu.edu.tw//handle/246246/2007041910042763application/pdf305166 bytesapplication/pdfen-USEllipsometer surface plasma resonanceotherhttp://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910042763/1/01529268.pdf