Lin, Chun-HungChun-HungLinChen, Hsuen-LiHsuen-LiChenChao, Wen-ChiWen-ChiChaoHsieh, Chung-IChung-IHsiehChang, Wen-HueiWen-HueiChang2008-12-312018-06-282008-12-312018-06-28200601679317http://ntur.lib.ntu.edu.tw//handle/246246/95618https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748261257&doi=10.1016%2fj.mee.2006.01.135&partnerID=40&md5=489c69a4daf516a121c7da37cf9faa9dA simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly. © 2006 Elsevier B.V. All rights reserved.application/pdf634634 bytesapplication/pdfen-USEllipsometry; Photonic crystal; Rigorous coupled-wave analysisCrystal lattices; Crystal structure; Electron beam lithography; Ellipsometry; Energy gap; Reflectometers; Silicon; Spectroscopic analysis; Wave effects; Photonic bandgap; Photonic crystals; Rigorous coupled wave analysis; Spectroscopic ellipsometry; Crystalsjournal article10.1016/j.mee.2006.01.1352-s2.0-33748261257http://ntur.lib.ntu.edu.tw/bitstream/246246/95618/1/19.pdf