Fabrication of a micromachined optical modulator using the CMOS process

Dai, C.-L.C.-L.DaiChen, H.-L.H.-L.ChenPEI-ZEN CHANG2020-04-282020-04-282001https://scholars.lib.ntu.edu.tw/handle/123456789/486856Fabrication of a micromachined optical modulator using the CMOS processjournal article10.1088/0960-1317/11/5/3262-s2.0-0035443264https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035443264&doi=10.1088%2f0960-1317%2f11%2f5%2f326&partnerID=40&md5=e7b4fba71cacfd941cb9ccf9ff391b3a