Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system

Yen-Min LeeJia-Han LiSheng-Yung ChenShiau-Yi MaKuen-Yu TsaiTony W. H. SheuJia-Yush YenKUEN-YU TSAI2018-09-102018-09-102010-11http://scholars.lib.ntu.edu.tw/handle/123456789/359322Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography systemconference paper