Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Lin M.-C.Chang L.-S.Lin H.C.HSIN-CHIH LIN2019-11-272019-11-27200801694332https://www.scopus.com/inward/record.uri?eid=2-s2.0-39749103522&doi=10.1016%2fj.apsusc.2007.11.064&partnerID=40&md5=aafb4eb1743dfec25b0de46ca88e527bhttps://scholars.lib.ntu.edu.tw/handle/123456789/432477Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputteringjournal article10.1016/j.apsusc.2007.11.0642-s2.0-39749103522