Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems

Kuen-Yu TsaiJia-Yush YenKUEN-YU TSAI2018-09-102018-09-101999-11http://scholars.lib.ntu.edu.tw/handle/123456789/352120Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systemsconference paper10.1109/iecon.1999.8221612-s2.0-0033282440