Hydration effects in the photoassisted wet chemical etching of gallium nitride

LUNG-HAN PENGChuang, C.-W.C.-W.ChuangHsu, Y.-C.Y.-C.HsuHo, J.-K.J.-K.HoHuang, C.-N.C.-N.HuangChen, C.-Y.C.-Y.Chen2020-06-112020-06-111998https://scholars.lib.ntu.edu.tw/handle/123456789/499550[SDGs]SDG6Hydration effects in the photoassisted wet chemical etching of gallium nitridejournal article10.1109/2944.7041192-s2.0-0032067970https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032067970&doi=10.1109%2f2944.704119&partnerID=40&md5=b4ac79c39f38647112680108bcaa10a2