工學院: 機械工程學研究所指導教授: 黃光裕劉亦凡Liu, Alan Yih-FineAlan Yih-FineLiu2017-03-132018-06-282017-03-132018-06-282016http://ntur.lib.ntu.edu.tw//handle/246246/278432隨著科技發展與量測技術的進步，微奈米級顯微術已成為進行精密工程的基本門檻。X光顯微術以其三維空間的高解析力，及高達微秒級的時間解析而漸受重視，因應X光顯微術的發展許多研究成果也有所突破。進行X光顯微術時更換樣品必須透過繁瑣的抽洩真空程序，秏時且費功。應用於X光顯微術之操作系統，則必須於真空腔內完成自動化之工作，亦須因應狹長的工作空間配置來運作。同時能自動化監控，並控制系統產熱量以減小對量測結果的影響。本論文之研究目的為開發適用於X光顯微術真空腔之操作裝置。 撓性機構因其不須潤滑、無背隙問題且能夠減少使用元件的數量而廣泛的應用於精密系統之中。本論文應用線性馬達模組配合橋式撓性機構設計開發具有平行開合與自動對心功能的撓性三爪夾頭。透過類剛體模型推導三爪夾頭之動力模型，並配合二維有限元素模擬得到夾爪參數化設計的模型，能有效的因應不同夾握需求而開發適當的三爪夾頭。 本論文設計開發之撓性三爪夾頭全長95 mm，徑向寬度34 mm。夾頭可以產生超過4 mm的開合，並具有對樣品施予200 g以上軸向力之功能。採用低產熱量的應變規取代視覺影像系統，能夠即時監控夾頭所受軸向作用力與夾臂的運動狀態。With the rapid progress of technology and metrology, micro-nanoscale microscopy has become prerequisite for precision engineering. X-ray microscopy iis recently in the limelight due to its excellent three-dimensional spatial resolution and up to microsecond time resolution. Many breakthrough novel scientific discoveries are contributed to the development of X-ray microscopy. Manual sample operation process in vacuum chamber of X-ray microscopy is a time- and energy-consuming task. Manipulators/grippers applied to the vacuum chamber should be able to automatically execute in the narrow space of X-ray microscope. Because environmental temperature fluctuation can cause obvious error for X-ray microscope, Monitoring equipment with high heat generation cannot be used. This thesis present the design and development of three jaw grippers adapted to vacuum chamber in X-ray microscope. Compliant mechanism is widely used among precision engineering due to its lubricant-free, reduction of mechanical element and having no backlash. We use the linear motor module with bridge-type mechanical amplifier developing compliant grippers with parallel opening and auto-centered function. We developed a dynamic model through pseudo rigid body model to anticipate the dynamic performance of the gripper. Further with two dimensional finite element method analysis, a parameterized model was build, which can apply for different grasping requisition. In this paper, the developed compliant gripper has full length of 95 mm, radial width of 34 mm. Gripper can produce more than 4 mm opening, and subject to more than 200 gwf axial force. Use strain gauge replace substitute vision imaging system can reduce thermal fluctuation and capable of real-time monitoring.5616030 bytesapplication/pdf論文公開時間: 2018/7/26論文使用權限: 同意有償授權(權利金給回饋學校)撓性機構三爪夾頭線性馬達模組應變規樣品操作Compliant mechanismcompliant gripperthree-jaw gripperlinear motor modulestrain gagesample manipulationthesis10.6342/NTU201600706http://ntur.lib.ntu.edu.tw/bitstream/246246/278432/1/ntu-105-R03522604-1.pdf