Yen, J. Y.J. Y.YenLin, I. M.I. M.LinLee, C. K.C. K.Lee2010-09-032018-06-292010-09-032018-06-292005-03http://ntur.lib.ntu.edu.tw//handle/246246/198161en-USEffect of Force Control Algorithms on the Scanning Probe Microscope Lithography System