Electrical characterization and process control of cost-effective high-k aluminum oxide gate dielectrics prepared by anodization followed by furnace annealing

JENN-GWO HWU2018-09-102018-09-102003http://www.scopus.com/inward/record.url?eid=2-s2.0-0041525422&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/301815[SDGs]SDG6Electrical characterization and process control of cost-effective high-k aluminum oxide gate dielectrics prepared by anodization followed by furnace annealingjournal article10.1109/TED.2003.813904