Huang, Y.-C.Y.-C.HuangChang, Y.-W.Y.-W.Chang2019-04-222019-04-222017https://www.scopus.com/inward/record.uri?eid=2-s2.0-85023642530&doi=10.1145%2f3061639.3062252&partnerID=40&md5=290fc1f6ffca2067d51a711a4b17d0b8https://scholars.lib.ntu.edu.tw/handle/123456789/405639Fogging Effect Aware Placement in Electron Beam Lithographyconference paper10.1145/3061639.3062252