Optical-constant tunable (ZrO2)x/(Cr2O3)y/(Al2O3)1–x–y optical superlattices for attenuated phase shift mask in ArF lithography

Lai, F. D.F. D.LaiWang, L. A.L. A.Wang2009-03-252018-07-062009-03-252018-07-062001http://ntur.lib.ntu.edu.tw//handle/246246/148181application/pdf75802 bytesapplication/pdfen-USOptical-constant tunable (ZrO2)x/(Cr2O3)y/(Al2O3)1–x–y optical superlattices for attenuated phase shift mask in ArF lithographyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/148181/1/37.pdf