Opportunity for improving fab effectiveness by predictive overall equipment effectiveness (POEE)

Kao, Y.-T.Y.-T.KaoChang, S.-C.S.-C.ChangDauzere-Peres, S.S.Dauzere-PeresBlue, J.J.BlueJAKEY BLUE2020-03-022020-03-022016https://scholars.lib.ntu.edu.tw/handle/123456789/467306[SDGs]SDG9Opportunity for improving fab effectiveness by predictive overall equipment effectiveness (POEE)conference paper2-s2.0-84999028726https://www.scopus.com/inward/record.uri?eid=2-s2.0-84999028726&partnerID=40&md5=ccbaf4ddd33e9a69344614458932c253