Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range

Li, Y.-Y.Y.-Y.LiLee, Y.-W.Y.-W.LeeWu, I.-C.I.-C.WuSHENG-LUNG HUANG2020-06-112020-06-112017https://scholars.lib.ntu.edu.tw/handle/123456789/501306Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet rangeconference paper10.1364/CLEO_AT.2017.AF2B.62-s2.0-85044256255https://www.scopus.com/inward/record.uri?eid=2-s2.0-85044256255&doi=10.1364%2fCLEO_AT.2017.AF2B.6&partnerID=40&md5=9f008ce03448dea4703c46247bca2f09