A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafers

Yang, L.-J.L.-J.YangChang, P.-Z.P.-Z.ChangLee, C.-K.C.-K.LeeCHIH-KUNG LEEPEI-ZEN CHANG2020-04-282020-04-281997https://scholars.lib.ntu.edu.tw/handle/123456789/486292A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafersconference paper10.1117/12.2935472-s2.0-0042981972https://www.scopus.com/inward/record.uri?eid=2-s2.0-0042981972&doi=10.1117%2f12.293547&partnerID=40&md5=83326a714cdbad75486029d14710ca58