Electromechanical coupling of CMOS-MEMS testkey for extracting material properties

Chuang, W.-C.W.-C.ChuangLee, H.-L.H.-L.LeeHu, Y.-C.Y.-C.HuShih, W.-P.W.-P.ShihChang, P.-Z.P.-Z.Chang2013-04-112018-06-282013-04-112018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/257123en-USElectromechanical coupling of CMOS-MEMS testkey for extracting material propertiesconference paper