Hollow stems for higher micromechanical disk resonator quality factor

Wu, L.L.WuAkgul, M.M.AkgulRen, Z.Z.RenLin, Y.Y.LinLi, W.-C.W.-C.LiNguyen, C.T.-C.C.T.-C.NguyenWEI-CHANG LI2020-04-282020-04-282011https://scholars.lib.ntu.edu.tw/handle/123456789/486407[SDGs]SDG7Hollow stems for higher micromechanical disk resonator quality factorconference paper10.1109/ULTSYM.2011.62936782-s2.0-84869066185https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869066185&doi=10.1109%2fULTSYM.2011.6293678&partnerID=40&md5=b2449193ae986a921c38a72a00769505