Wu, T.-H.T.-H.WuJIAN-ZHANG CHENI-CHUN CHENGHsu C.-C.2020-06-162020-06-162014https://www.scopus.com/inward/record.uri?eid=2-s2.0-84902007595&doi=10.1088%2f0022-3727%2f47%2f25%2f255102&partnerID=40&md5=16edb7fe602150bf37c0a8e798ccfca4We investigate the electromechanical properties of radio frequency (rf)-sputtered MgZnO/ZnO heterostructures on flexible polyimide (PI) and stainless steel 304 (StSt304) substrates. By subjecting ZnO to ultra-short (30-40s) atmospheric pressure plasma jet treatment and prolonged (>3h) thermal annealing at 300C, highly conductive interfaces are induced in rf-sputtered MgZnO/ZnO heterostructures on flexible PI and StSt304 substrates. The electrical properties of on-StSt MgZnO/ZnO annealed at 400C for 30min are evaluated under the inward and outward bending conditions. Furthermore, the electrical properties of on-PI MgZnO/ZnO heterostructures annealed at 300C for 3h are examined under the bending and stretching conditions. Compared with ZnO, MgZnO/ZnO heterostructures show better electrical stability under mechanical flexing; deviations in the electrical properties of MgZnO/ZnO heterostructures occur under larger strain levels. Piezoelectric polarization is induced under flexing, resulting in an increase or decrease in the resistance of MgZnO/ZnO heterostructures. © 2014 IOP Publishing Ltd.atmospheric pressure plasma jet; bend testing; flexible electronics; MgZnO/ZnO heterostructure; sputtering; ZnOAnnealing; Flexible electronics; Heterojunctions; Interfaces (materials); Plasma jets; Polyimides; Sputtering; Stainless steel; Zinc oxide; Atmospheric pressure plasma jets; Bend testing; Electrical stability; Electromechanical property; MgZnO/ZnO heterostructure; Piezoelectric polarizations; Stainless steel substrates; ZnO; Electric propertiesjournal article10.1088/0022-3727/47/25/2551022-s2.0-84902007595