Fabrication of autocloned photonic crystals by using high-density-plasma chemical vapor deposition

Chen, H.L.H.L.ChenLee, H.F.H.F.LeeChao, W.C.W.C.ChaoHsieh, C.I.C.I.HsiehKo, F.H.F.H.KoChu, T.C.T.C.ChuHSUEN-LI CHEN2020-05-122020-05-122004https://scholars.lib.ntu.edu.tw/handle/123456789/491355[SDGs]SDG16Fabrication of autocloned photonic crystals by using high-density-plasma chemical vapor depositionconference paper10.1116/1.18240592-s2.0-13244272357https://www.scopus.com/inward/record.uri?eid=2-s2.0-13244272357&doi=10.1116%2f1.1824059&partnerID=40&md5=96d0efa08e0f89a95175849a07f6a5b7