Wet etching X-cut LiNbO3 Using Diluted Joint Proton Source

Ting, Tien-LunTien-LunTingChen, Liang-YinLiang-YinChenWang, Way-SeenWay-SeenWang2009-03-252018-07-062009-03-252018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/147925application/pdf172056 bytesapplication/pdfen-USWet etching X-cut LiNbO3 Using Diluted Joint Proton Sourcejournal article