3-D surface profilometry using simultaneous phase-shifting interferometry

Chen, L.-C.L.-C.ChenYeh, S.-L.S.-L.YehTapilouw, A.M.A.M.TapilouwChang, J.-C.J.-C.ChangLIANG-CHIA CHEN2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/4478663-D surface profilometry using simultaneous phase-shifting interferometryjournal article10.1016/j.optcom.2010.05.0012-s2.0-77953652232https://www.scopus.com/inward/record.uri?eid=2-s2.0-77953652232&doi=10.1016%2fj.optcom.2010.05.001&partnerID=40&md5=ab5e1cece2172fb19399b37210ede108