Chou, J.-S.J.-S.ChouSI-CHEN LEE2020-06-112020-06-111994https://scholars.lib.ntu.edu.tw/handle/123456789/498748[SDGs]SDG6Improved process for liquid phase deposition of silicon dioxidejournal article10.1063/1.1117592-s2.0-36449002871https://www.scopus.com/inward/record.uri?eid=2-s2.0-36449002871&doi=10.1063%2f1.111759&partnerID=40&md5=8b96a8e4e59f1c9007aff3f7dd8de7a6