Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method

Lin, S.-C.S.-C.LinWu, W.-J.W.-J.WuWEN-JONG WU2020-01-172020-01-172013https://scholars.lib.ntu.edu.tw/handle/123456789/451985Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition methodjournal article10.1088/0960-1317/23/12/1250282-s2.0-84889063821https://www.scopus.com/inward/record.uri?eid=2-s2.0-84889063821&doi=10.1088%2f0960-1317%2f23%2f12%2f125028&partnerID=40&md5=fc5bbee5e42edc9d4b2122e77e3f349b