Liu, Chun-KaiChun-KaiLiuYu, Chih-KuangChih-KuangYuChien, Heng-ChiehHeng-ChiehChienHsu, Chung-YenChung-YenHsuDai, Ming-JiMing-JiDaiLuo, Guang-LiGuang-LiLuoHuang, Mei-JiauMei-JiauHuang2011-02-112018-06-282011-02-112018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/222469en-USThermal conductivity of Si/SiGe superlatice filmjournal article