Chen Y.Y.Wu R.C.Wang F.C.JIA-YUSH YEN2019-07-032019-07-0320149.78491E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-84911868463&doi=10.1109%2fSICE.2014.6935203&partnerID=40&md5=29a6b8d160b1aebed250d52c5a3d19b2https://scholars.lib.ntu.edu.tw/handle/123456789/412582[SDGs]SDG7Sensor layouts for a long-stroke nano-positioning stageconference paper10.1109/SICE.2014.69352032-s2.0-84911868463